Bayanin Masu Tsare Photoresist
Mai hana haske, wanda kuma aka sani da mai hana haske, yana nufin wani siraran fim wanda narkewarsa ke canzawa lokacin da aka fallasa shi ga hasken UV, hasken lantarki, hasken ion, hasken X, ko wani hasken da ke fitowa daga hasken.
Ya ƙunshi resin, mai kunna photoinitiator, wani sinadari mai narkewa, monomer, da sauran ƙarin abubuwa (duba Jadawali na 1). Resin mai hana photoresist da mai kunna photoinitiator sune mafi mahimmancin abubuwan da ke shafar aikin hana photoresist. Ana amfani da shi azaman murfin hana lalata yayin aikin photolithography.
Lokacin sarrafa saman semiconductor, amfani da mai hana daukar hoto mai kyau zai iya ƙirƙirar hoton da ake so a saman.
Tebur 1.
| Sinadaran Masu Tsabtace Photoresist | Aiki |
| Maganin narkewa | Yana sa hasken photoresist ya zama mai ruwa da kuma canzawa, kuma kusan ba shi da wani tasiri ga halayen sinadarai na hasken photoresist. |
| Mai fara ɗaukar hoto | Ana kuma san shi da mai ɗaukar hoto ko wakili mai ɗaukar hoto, kuma shine bangaren ɗaukar hoto a cikin kayan hana ɗaukar hoto. Wani nau'in mahaɗi ne wanda zai iya ruɓewa zuwa radicals ko cations kuma ya fara halayen haɗin sinadarai a cikin monomers bayan ya sha ultraviolet ko kuzarin haske da ake gani na wani tsayi. |
| Guduro | Yana da sinadarai marasa aiki, kuma yana aiki a matsayin masu ɗaurewa don riƙe kayan daban-daban a cikin mai hana haske tare, yana ba mai hana haske halayensa na injiniya da sinadarai. |
| Monomer | Ana kuma san shi da masu narkewar abubuwa masu aiki, ƙananan ƙwayoyin halitta ne waɗanda ke ɗauke da ƙungiyoyin aiki masu polymerizable kuma ƙananan mahaɗan nauyin ƙwayoyin halitta ne waɗanda zasu iya shiga cikin halayen polymerization don samar da resins mai nauyin ƙwayoyin halitta. |
| Ƙari | Ana amfani da shi don sarrafa takamaiman halayen sinadarai na masu hana hasken rana. |
Ana rarraba masu hana daukar hoto zuwa manyan rukuni biyu bisa ga hoton da suka samar: mai kyau da mara kyau. A lokacin aikin hana daukar hoto, bayan fallasa da kuma ci gaba, sassan da aka fallasa na murfin suna narkewa, suna barin sassan da ba a fallasa ba. Ana ɗaukar wannan murfin a matsayin mai hana daukar hoto mai kyau. Idan sassan da aka fallasa suka kasance yayin da sassan da ba a fallasa ba suka narke, ana ɗaukar murfin a matsayin mai hana daukar hoto mara kyau. Dangane da tushen hasken da tushen hasken ke fitarwa da tushen hasken, ana ƙara rarraba masu hana daukar hoto zuwa UV (gami da masu hana daukar hoto mai kyau da mara kyau na UV), masu hana daukar hoto mai zurfi na UV (DUV), masu hana daukar hoto mai haske na X-ray, masu hana daukar hoto mai haske na electron, da masu hana daukar hoto mai haske na ion.
Ana amfani da na'urar Photoresist musamman wajen sarrafa tsare-tsare masu kyau a cikin allunan nuni, da'irori masu haɗawa, da na'urorin semiconductor daban-daban. Fasahar samarwa da ke bayan na'urar photoresist tana da sarkakiya, tare da nau'ikan samfura iri-iri da ƙayyadaddun bayanai. Kera da'irori masu haɗawa na masana'antar lantarki yana sanya tsauraran buƙatu ga na'urar photoresist da aka yi amfani da ita.
Ever Ray, wani kamfani mai shekaru 20 na gwaninta a fannin samarwa da haɓaka resins masu iya ɗaukar hoto, yana da ƙarfin samar da tan 20,000 a kowace shekara, cikakken layin samfura, da kuma ikon keɓance samfura. A fannin photoresist, Ever Ray yana da resin 17501 a matsayin babban ɓangaren.
